Measurement of thermally induced vibrations of microelectronic devices by use of a heterodyne electronic speckle pattern interferometry imaging technique

✍ Scribed by Grauby, Stéphane ;Dilhaire, Stefan ;Jorez, Sébastien ;Lopez, Luis David Patino ;Rampnoux, Jean-Michel ;Claeys, Wilfrid

• Book ID: 115350604
• Publisher: The Optical Society
• Year: 2003
• Tongue: English
• Weight: 742 KB
• Volume: 42
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.42.001763