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Measurement of the thickness of thin films deposited on smooth non-planar substrates.

โœ Scribed by S.E. Gustafsson; Ijaz-Ur-Rehman; M. Saleem Iqbal


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
380 KB
Volume
10
Category
Article
ISSN
0030-3992

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Non-destructive thickness measurement of
โœ R.P. Shukla; D.V. Udupa; N.C. Das; Murty V. Mantravadi ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 655 KB

A quick estimation of the thickness of thin films deposited on glass plates is described in this paper. The principle of the method is based on the measurement of the Haidinger fringes generated by the film. For ease of observation and measurement, a commercial Fizeau-type interferometer such as a Z