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Measurement of the Step Height in the Nanometric Range Using a Laser Microinterferometer

✍ Scribed by A. N. Korolev; V. I. Korotkov; A. Ya. Lukin; S. A. Pul’kin; A. L. Sizov


Book ID
106464754
Publisher
Springer US
Year
2005
Tongue
English
Weight
242 KB
Volume
48
Category
Article
ISSN
0543-1972

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