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Measurement of the boron distribution in 10B-implanted silicon by the (n,α) nuclear reaction

✍ Scribed by G. Mezey; Z. Szökefalvi-nagy; Cs. Badinka

Book ID: 107859957
Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 129 KB
Volume: 19
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(73)90034-5

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