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Measurement of the Al content in AlGaN epitaxial layers by combined energy-dispersive X-ray and electron energy-loss spectroscopy in a transmission electron microscope

✍ Scribed by Houari Amari; Menno J. Kappers; Colin J. Humphreys; Caroline Chèze; Thomas Walther

Book ID: 112181241
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 514 KB
Volume: 9
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201100165

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