Thickness measurements with electron ene
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K. Iakoubovskii; K. Mitsuishi; Y. Nakayama; K. Furuya
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Article
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2008
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John Wiley and Sons
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English
β 401 KB
## Abstract Measurements of thickness using electron energy loss spectroscopy (EELS) are revised. Absolute thickness values can be quickly and accurately determined with the KramersβKronig sum method. The EELS data analysis is even much easier with the logβratio method, however, absolute calibratio