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Measurement of rocking curve wings at high X-ray energies

✍ Scribed by D. Chapman; J. Hastings; H. Moulin; D.P. Siddons; R.F. Garrett; E. Nachaliel; F.A. Dilmanian

Book ID
103610629
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
486 KB
Volume
319
Category
Article
ISSN
0168-9002

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## Abstract Spatially resolved rocking curve imaging has been used to analyze laterally overgrown silicon layers grown by liquid phase epitaxy. We were able to study both the overgrown layer as well as the strain fluctuations of the Si substrate underneath by means of a tabletop x‐ray topographic s