Measurement of resistivity of silicon epitaxial layers by the three-point probe technique : E. E. Gardner and P. A. Schumann, Jr.Solid-State Electronics8, 165 (1965)

• Book ID: 113190131
• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 95 KB
• Volume: 4
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(65)90139-3