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Measurement of pull-off force for planar contact at the microscale

✍ Scribed by Rabenorosoa, K.; Clevy, C.; Lutz, P.; Gauthier, M.; Rougeot, P.

Book ID
114461327
Publisher
The Institution of Engineering and Technology
Year
2009
Tongue
English
Weight
440 KB
Volume
4
Category
Article
ISSN
1750-0443

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The friction and pull-off forces were measured between atomic force microscope AFM probe and submicron-size asperity arrays on Ε½ . a silicon wafer in various relative humidities. First, a focused ion beam FIB was used to produce two-dimensional arrays in which asperities were arranged at uniform int