Measurement of C2 radical density in microwave methane/hydrogen plasma used for nanocrystalline diamond film formation

✍ Scribed by Hiramatsu, M.; Kato, K.; Lau, C.H.; Foord, J.S.; Hori, M.

• Book ID: 121910374
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 719 KB
• Volume: 12
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(02)00216-9