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Measurement applications of the scanning acoustic microscope

✍ Scribed by Kulik, A.; Gremaud, G.; Richard, P.; Sommer, J.-M.


Book ID
123470872
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
361 KB
Volume
211-212
Category
Article
ISSN
0925-8388

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We report on the investigation of surface acoustic wave (SAW) Ðelds by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface osc