๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

MCP Wafer Technology profile


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
327 KB
Volume
27
Category
Article
ISSN
0026-2692

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Silicon-on-diamond (SOD) structured wafer with 4-inch diameter was fabricated by the technologies of CVD diamond deposition, Si wafer bonding and thinning. Diamond thin film with high quality and low interface state 1 density was uniformly deposited on Silicon (001) substrate, continuous H ion bomba