๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Materials Science: Sputtering


Book ID
120438731
Publisher
Nature Publishing Group
Year
1968
Tongue
English
Weight
76 KB
Volume
220
Category
Article
ISSN
0028-0836

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with rea