Materials Science in Microelectronics I, Second Edition: The Relationships Between Thin Film Processing & Structure

✍ Scribed by Eugene Machlin

Publisher: Elsevier Science
Year: 2005
Tongue: English
Leaves: 275
Edition: 2
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

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