Materials Science of Thin Films - Deposition and Structure

✍ Scribed by Ohring, Milton

Publisher: Elsevier
Year: 2002
Tongue: English
Leaves: 831
Edition: 2nd Edition
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The Second Edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.

✦ Table of Contents

Content:
Front Matter
A Historical Perspective
• Preface
• Table of Contents
1. A Review of Materials Science
2. Vacuum Science and Technology
3. Thin-Film Evaporation Processes
4. Discharges, Plasmas, and Ion - Surface Interactions
5. Plasma and Ion Beam Processing of Thin Films
6. Chemical Vapor Deposition
7. Substrate Surfaces and Thin-Film Nucleation
8. Epitaxy
9. Film Structure
10. Characterization of Thin Films and Surfaces
11. Interdiffusion, Reactions, and Transformations in Thin Films
12. Mechanical Properties of Thin Films
Index

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