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Materials Modification by High-fluence Ion Beams || Low Energy (300 eV - 10 keV) Ar+ and Cl+ Ion Irradiation of (100) Si

✍ Scribed by Kelly, Roger; Silva, M. Fernanda

Book ID: 121306831
Publisher: Springer Netherlands
Year: 1989
Weight: 901 KB
Category: Article
ISBN: 9400912676
DOI: 10.1007/978-94-009-1267-0_17

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