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Material Studies on Si:C Epitaxial Films Grown by CVD

โœ Scribed by Dhayalan, S.; Loo, R.; Rosseel, E.; Hikavyy, A. Y.; Shimura, Y.; Nuytten, T.; Richard, O.; Bender, H.; Douhard, B.; Vandervorst, W.

Book ID
127238539
Publisher
The Electrochemical Society
Year
2014
Tongue
English
Weight
811 KB
Volume
64
Category
Article
ISSN
1938-6737

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