Material properties and growth control of undoped and Sn-doped In2O3 thin films prepared by using ion beam technologies
β Scribed by Seok-Keun Koh; Young-gun Han; Jung Hwan Lee; Un-Jung Yeo; Jun-Sik Cho
- Book ID
- 108289094
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 538 KB
- Volume
- 496
- Category
- Article
- ISSN
- 0040-6090
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π SIMILAR VOLUMES
Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had le
## Abstract Tiβdoped In~2~O~3~ (ITiO) thin films have been prepared by electron beam physical vapour deposition (EBβPVD). Their optical and electrical properties are studied for the obtained compositions. After oxygen annealing all samples show excellent optical transparence; additionally, maximum