Material and electrical characterization of carbon-doped Ta[sub 2]O[sub 5] films for embedded dynamic random access memory applications

✍ Scribed by K. Chu; J. P. Chang; M. L. Steigerwald; R. M. Fleming; R. L. Opila; D. V. Lang; R. B. Van Dover; C. D. W. Jones

• Book ID: 123609899
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 331 KB
• Volume: 91
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1418420