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Matching of TiN coating structures by plasma nitriding of substrates

✍ Scribed by M Zlatanovi'c; T Gredić; N Popović; Ž Bogdanov

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
745 KB
Volume
44
Category
Article
ISSN
0042-207X

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✍ T. Czerwiec; K. Anoun; M. Remy; H. Michel 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 859 KB

Titanium nitride coatings were achieved by sputtering a cylindrical titanium hollow cathode in Ar-H2-N 2 plasma at a pressure of 10 Pa. A microstructural analysis of these coatings has been carried out by transmission electron spectroscopy. When the initial temperature of the substrate to be coated