Mass spectroscopy of background gases in glow-discharge sputtering of tantalum thin films: J Sosniak, J Vac Sci Technol, 4 (2), March/April 1967, 87–93

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 172 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)90749-x