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Investigation of sputtered β-tantalum thin films: HC Cook, J Vac Sci Technol, 4 (2), March/April 1967, 80–86

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 172 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)90748-8

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Mass spectroscopy of background gases in

Mass spectroscopy of background gases in glow-discharge sputtering of tantalum thin films: J Sosniak, J Vac Sci Technol, 4 (2), March/April 1967, 87–93

📂 Article 📅 1967 🏛 Elsevier Science 🌐 English ⚖ 172 KB