𝔖 Bobbio Scriptorium
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Mass spectrometry for plasma end-point detection

Book ID
103468205
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
108 KB
Volume
42
Category
Article
ISSN
0042-207X

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The stripping ofamorphous hydrogenated carbon films (a-C:H) using an rf oxygen plasma has been monitored using the optical emission from electronically excited CO, Hand 0 species in the visible region of the spectrum. The end point has been detected by monitoring the emission intensity of 0 reactive