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Mass-spectrometry determination of the boron impurity distribution profile in ion-implanted silicon single crystals: R I Garber et al, Radiation Physics of Non-metallic Crystals, 3, Part 2, Collection, Kiev Naukovaya Dumka 1971, 143–148 (in Russian)

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 168 KB
Volume: 22
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(72)90619-7

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