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Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy

✍ Scribed by S.W. King; J. Bielefeld; M. French; W.A. Lanford

Book ID: 116672873
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 966 KB
Volume: 357
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2011.07.004

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