Maskless micro/nanofabrication on GaAs surface by friction-induced selective etching

✍ Scribed by Tang, Peng; Yu, Bingjun; Guo, Jian; Song, Chenfei; Qian, Linmao

• Book ID: 121547951
• Publisher: Springer-Verlag
• Year: 2014
• Tongue: English
• Weight: 489 KB
• Volume: 9
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276X-9-59