✦ LIBER ✦

Maskless fabrication of contact vias by focused MeV heavy ion beam

✍ Scribed by Yoshiaki Mokuno; Yuji Horino; Atsushi Kinomura; Akiyoshi Chayahara; Masato Kiuchi; Shigeharu Tamura; Kanenaga Fujii; Mikio Takai

No coin nor oath required. For personal study only.

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