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Mapping of ion beam induced current changes in FinFETs

✍ Scribed by C.D. Weis; A. Schuh; A. Batra; A. Persaud; I.W. Rangelow; J. Bokor; C.C. Lo; S. Cabrini; D. Olynick; S. Duhey; T. Schenkel

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 435 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.019

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