Manufacturing pinhole arrays for X-ray source diagnostics using LIGA

✍ Scribed by M. Gerner; K. Holldack; R. Lüttge; M. Schmidt

• Book ID: 106186330
• Publisher: Springer-Verlag
• Year: 1998
• Tongue: English
• Weight: 223 KB
• Volume: 4
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050127