✦ LIBER ✦

Magnetic microactuation of torsional polysilicon structures

✍ Scribed by Jack W Judy; Richard S Muller

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Pull-in study of an electrostatic torsio

✍ Degani, O.; Socher, E.; Lipson, A.; Lejtner, T.; Setter, D.J.; Kaldor, S.; Nemir 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 336 KB

Design, fabrication, position sensing, a

✍ Cheung, P.; Horowitz, R.; Rowe, R.T. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 847 KB

Modeling of fatigue in polysilicon MEMS

✍ K. Bhalerao; A. B. O. Soboyejo; W. O. Soboyejo 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 328 KB

Torsional stability of nonlinear eccentr

✍ Pradip K. Syamal; O.A. Pekau 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 753 KB

Plasma etching of polysilicon/nitride/po

✍ Y.X. Li; M. Laros; P.M. Sarro; P.J. French; R.F. Wolffenbuttel 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 283 KB

Theory of switching in polysilicon n-p+

✍ M. Darwish; K. Board 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 654 KB