✦ LIBER ✦
Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator
✍ Scribed by Cheung, P.; Horowitz, R.; Rowe, R.T.
- Book ID
- 114549098
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 847 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0018-9464
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