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Machining integrated optical structures in photoresist

โœ Scribed by Dill, F.H.; Neureuther, A.R.


Book ID
114591578
Publisher
IEEE
Year
1973
Tongue
English
Weight
185 KB
Volume
20
Category
Article
ISSN
0018-9383

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Partially and fully cured thin film phot
โœ Gowri Arun; V.K Sharma; A Kapoor; K.N Tripathi ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 101 KB

A systematic and detailed study of waveguide fabrication and characterization of a commercially available (from Shipley) photoresist is reported. Various waveguide properties such as refractive index, optical losses, waveguide thickness, dispersion and birefringence are reported. E ect of temperatur