M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

✍ Scribed by Osterberg, P.M.; Senturia, S.D.

• Book ID: 118187304
• Publisher: IEEE
• Year: 1997
• Tongue: English
• Weight: 358 KB
• Volume: 6
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/84.585788