✦ LIBER ✦
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
✍ Scribed by Darcy T. Haluzan; David M. Klymyshyn; Sven Achenbach; Martin Börner; Jürgen Mohr
- Book ID
- 113047109
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 566 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0946-7076
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