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Luminescent layers for ion-photon emission microscopy

โœ Scribed by C Yang; B.L Doyle; P Rossi; M Nigam; M El Bouanani; J.L Duggan; F.D McDaniel

Book ID
114164796
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
351 KB
Volume
181
Category
Article
ISSN
0168-583X

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At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.