Position sensitive detectors for ion ele
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D. Bisello; A. Candelori; P. Giubilato; A. Kaminsky; S. Mattiazzo; M. Nigro; D.
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Article
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2007
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Elsevier Science
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English
β 228 KB
At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.