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Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®

✍ Scribed by Kalathil C. Eapen; Steven T. Patton; Jeffrey S. Zabinski

Book ID: 110326103
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 178 KB
Volume: 12
Category: Article
ISSN: 1023-8883
DOI: 10.1023/a:1013971321480

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