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Low-Voltage Driven MEMS VOA Using Torsional Attenuation Mechanism Based on Piezoelectric Beam Actuators

✍ Scribed by Kah How Koh; Kobayashi, T.; Chengkuo Lee

Book ID: 119805728
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 309 KB
Volume: 22
Category: Article
ISSN: 1041-1135
DOI: 10.1109/lpt.2010.2056679

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