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Low thermal budget solid phase epitaxial growth of CaF2on Si (111) substrates

✍ Scribed by R. Singh; R. P. S. Thakur; A. J. Nelson; S. C. Gebhard; A. B. Swartzlander


Book ID
112812168
Publisher
Springer US
Year
1990
Tongue
English
Weight
744 KB
Volume
19
Category
Article
ISSN
0361-5235

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Molecular beam epitaxy was used to grow MnF 2 films on a Si(111) substrate with a thin CaF 2 buffer at room temperature. It was found that films thinner than three molecular layers have a cubic fluorite crystal structure inherited from CaF 2 . The MnF 2 film is coherent to the substrate and has an i