𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Low temperature sputter deposition of SnOx:Sb films for transparent conducting oxide applications

✍ Scribed by J. Boltz; D. Koehl; M. Wuttig

Book ID
108278723
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
385 KB
Volume
205
Category
Article
ISSN
0257-8972

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Low temperature growth of transparent co
Low temperature growth of transparent conducting ZnO films by plasma assisted deposition
✍ Nishii, A. ;Uehara, T. ;Sakano, T. ;Nabetani, Y. ;Akitsu, T. ;Kato, T. ;Matsumot πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 599 KB

## Abstract Transparent conducting ZnO films are deposited by plasma assisted deposition technique on glass and plastic substrates at temperatures 60 ∼ 300 Β°C using metallic Zn, metallic Ga and plasma‐excited oxygen as source materials. Deposited films were characterized by X‐ray diffraction (XRD),