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Low-temperature silicon nitride: a promising dielectric in semiconductor technology

✍ Scribed by V.I. Zakhar'in; N.M. Rubtsov; V.I. Rubtsov; Yu.M. Shul'ga

Book ID: 103425531
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 583 KB
Volume: 216
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90848-6

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