Characteristics of low K thin film micro
✍
Hung-Wei Wu; Min-Hang Weng; Yan-Kuin Su; Ru-Yuan Yang
📂
Article
📅
2006
🏛
John Wiley and Sons
🌐
English
⚖ 380 KB
## Abstract In this paper, effective dielectric constant, line attenuation, and characteristic impedance of thin film microstrip line (TFML) on polyimide dielectric as interconnection for radio frequency integrated circuits is investigated. The TFML is fabricated on low cost low resistivity silicon