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Low temperature ion beam mixing of bilayers and multilayers in the Ti-Cu system

✍ Scribed by P. Børgesen; T. L. Alford; D. A. Lilienfeld; H. H. Johnson


Publisher
Springer
Year
1990
Tongue
English
Weight
383 KB
Volume
50
Category
Article
ISSN
1432-0630

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Influence of ion mixing, ion beam-induce
✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf