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Low-temperature growth of epitaxial ZnO films on (001) sapphire by ultraviolet- assisted pulsed laser deposition

✍ Scribed by V. Craciun; J. Perriere; N. Bassim; R.K. Singh; D. Craciun; J. Spear


Publisher
Springer
Year
1999
Tongue
English
Weight
141 KB
Volume
69
Category
Article
ISSN
1432-0630

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## Abstract Transparent conducting ZnO films are deposited by plasma assisted deposition technique on glass and plastic substrates at temperatures 60 ∼ 300 Β°C using metallic Zn, metallic Ga and plasma‐excited oxygen as source materials. Deposited films were characterized by X‐ray diffraction (XRD),