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Low temperature formation of Si/silicide/Si double heterostructures by self-aligned MBE growth

โœ Scribed by T. Ohsima; N. Nakamura; K. Nakagawa; M. Miyao


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
561 KB
Volume
184
Category
Article
ISSN
0040-6090

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