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Low-Temperature Fabrication of Si Thin-Film Transistor Microstructures by Soft Lithographic Patterning on Curved and Planar Substrates

✍ Scribed by Erhardt, Martin K.; Jin, Hyun-Chul; Abelson, John R.; Nuzzo, Ralph G.

Book ID: 126398062
Publisher: American Chemical Society
Year: 2000
Tongue: English
Weight: 705 KB
Volume: 12
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm000480t

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