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Low temperature doping of arsenic atoms in silicon during Pd2Si formation

✍ Scribed by I. Ohdomari; K. Suguro; M. Akiyama; T. Maeda; K.N. Tu; I. Kimura; K. Yoneda

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 245 KB
Volume: 89
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90307-8

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