✦ LIBER ✦
Steep doping profiles obtained by low-energy implantation of arsenic in silicon MBE layers
✍ Scribed by N. Djebbar; J. Gutierrez; H. Charki; A. Vapaille; G. Prudon; J.C. Dupuy
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 389 KB
- Volume
- 184
- Category
- Article
- ISSN
- 0040-6090
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