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Low temperature deposition of SiO2 thin films on plastics as a hard coating using TEOS/Oz-plasma 3 : Hiroaki Tamamaki, Masaya Nomura, Keiichiro Sano (Suzuki Motor Corp.), Yoichiro Nakanishi, Yoshinori Hatanaka (Shizuoka University Research Institute of Electronics)

Book ID: 104342551
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 136 KB
Volume: 18
Category: Article
ISSN: 0389-4304
DOI: 10.1016/s0389-4304(97)85165-x

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