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Low temperature deposition of nanocrystalline silicon carbide thin films

✍ Scribed by Kerdiles, S.; Berthelot, A.; Gourbilleau, F.; Rizk, R.

Book ID: 120471027
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 409 KB
Volume: 76
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.126350

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